Unisantis Electronics unveils 12-EUV Layer Surrounding Gate Transistor (SGT) for Vertical 6-T SRAM: 5-nm-class Technology for Ultra-Density Logic Devices at VLSI Technology Symposium 2019

2019 Symposium on VLSI Technology and Circuits, Kyoto Japan

12-EUV Layer Surrounding Gate Transistor (SGT) for Vertical 6-T SRAM: 5-nm-class Technology for Ultra-Density Logic Devices